JPH02116738U - - Google Patents

Info

Publication number
JPH02116738U
JPH02116738U JP2625289U JP2625289U JPH02116738U JP H02116738 U JPH02116738 U JP H02116738U JP 2625289 U JP2625289 U JP 2625289U JP 2625289 U JP2625289 U JP 2625289U JP H02116738 U JPH02116738 U JP H02116738U
Authority
JP
Japan
Prior art keywords
wafer cassette
detecting
test object
rocking lever
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2625289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0713222Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2625289U priority Critical patent/JPH0713222Y2/ja
Publication of JPH02116738U publication Critical patent/JPH02116738U/ja
Application granted granted Critical
Publication of JPH0713222Y2 publication Critical patent/JPH0713222Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP2625289U 1989-03-07 1989-03-07 ウエハカセットの位置決め検知装置 Expired - Lifetime JPH0713222Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2625289U JPH0713222Y2 (ja) 1989-03-07 1989-03-07 ウエハカセットの位置決め検知装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2625289U JPH0713222Y2 (ja) 1989-03-07 1989-03-07 ウエハカセットの位置決め検知装置

Publications (2)

Publication Number Publication Date
JPH02116738U true JPH02116738U (en]) 1990-09-19
JPH0713222Y2 JPH0713222Y2 (ja) 1995-03-29

Family

ID=31247714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2625289U Expired - Lifetime JPH0713222Y2 (ja) 1989-03-07 1989-03-07 ウエハカセットの位置決め検知装置

Country Status (1)

Country Link
JP (1) JPH0713222Y2 (en])

Also Published As

Publication number Publication date
JPH0713222Y2 (ja) 1995-03-29

Similar Documents

Publication Publication Date Title
JPH02116738U (en])
JPS59145392U (ja) ベランダ手摺取付型物干し竿支持具
JPS60178590U (ja) ロボツトア−ムの位置決め装置
JPS62124851U (en])
JPS6192678U (en])
JPS59183334U (ja) 振り子式振れ出し装置
JPS6365145U (en])
JPS6447751U (en])
JPS6372743U (en])
JPS6156584U (en])
JPH0467952U (en])
JPS61104307U (en])
JPS5854525U (ja) 液面検出器
JPS62201008U (en])
JPH0174530U (en])
JPS63140336U (en])
JPS62204017U (en])
JPS6318453U (en])
JPS6335950U (en])
JPS6199074U (en])
JPS60182014U (ja) 座高計
JPS61152980U (en])
JPS62158353U (en])
JPH0393714U (en])
JPS62132563U (en])